Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9
By:"R. Ekwal Sah"
Published on 2007-01-01 by The Electrochemical Society
This issue of ECS Transactions contains the papers presented in the symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectics held May 6-11, 2007 in Chicago. Papers were presented on deposition, characterization and applications of the dielectrics including high- and low-k dielectrics, as well as interface states, device characterization, reliabiliy and modeling.
This Book was ranked 19 by Google Books for keyword RF and Mm Wave Power Generation in Silicon.
0 Response to "Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9"
Post a Comment