Compact Multi-physics Models for Large-displacement Multilayer Cantilevers in RF MEMS Circuits, Antennas and Sensors
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Published on 2008 by ProQuest
We demonstrate compact analytical multi-physics models that accurately predict the deformed shape of a variety of multilayer cantilevers and the associated electrical characteristics when employed in several practical sensor and RF applications. We pay particular attention to structures relying on large mechanical displacements in order to achieve the desired performance. Practical applications of these cantilevers are shown in several important cases including; (a) a harsh-environment temperature sensor; (b) high-Q three-dimensional inductors; (c) an electrothermal actuator for highly tunable inductor; and (d) mm-wave on-chip antenna with high radiation efficiency. In all cases, obtaining large deflections is key in achieving the required performance.
This Book was ranked 8 by Google Books for keyword Multiphysics Modeling.
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